Semiconductor ETFs
Explore semiconductor and chip ETFs ranked by ETF Copilot on growth and fundamentals, with top funds updated daily. Scores, holdings, fees and valuation.
Updated October 9, 2026
What stands out across Semiconductor ETFs
Expense ratios on this page run from 0.19% to 0.55% a year, a median of 0.35%. SOXQ is the cheapest of the 5 shown.
Across the 5 funds shown, ETF Copilot's overall scores run from 5.4 to 7.1 out of 10, with a median of 6.8.
Concentration varies widely here: the ten largest holdings account for 29% of assets in the least concentrated fund and 68% in the most, a median of 59% across the list.
2 of 5 are more concentrated than the typical fund in their own category, on ETF Copilot's concentration measure.
The typical semiconductor fund on this page behaves like 19 equally weighted positions once holding weights are taken into account.
As of October 9, 2026, the largest Semiconductor ETFs fund by assets is VanEck Semiconductor ETF (SMH).
The 5 funds on this list
| # | Fund | ETF Copilot score | Expense ratio | Assets | Top 10 weight | Largest exposures |
|---|---|---|---|---|---|---|
| 1 | VanEck Semiconductor ETF (SMH) | 7.1/10 | 0.35% | $73.9B | 68% | Tech 100%, Semiconductors 92% |
| 2 | iShares Semiconductor ETF (SOXX) | 6.8/10 | 0.33% | $48.2B | 61% | Tech 100%, Semiconductors 95% |
| 3 | Invesco PHLX Semiconductor ETF (SOXQ) | 7.1/10 | 0.19% | $3.2B | 59% | Tech 100%, Semiconductors 96% |
| 4 | State Street SPDR S&P Semiconductor ETF (XSD) | 5.4/10 | 0.35% | $3.1B | 29% | Tech 97%, Semiconductors 83% |
| 5 | Invesco Semiconductors ETF (PSI) | 5.6/10 | 0.55% | $3.1B | 48% | Tech 100%, Semiconductors 98% |
ETF Copilot's 0–10 score rates a fund on value, growth, quality and risk against every US equity ETF we track. How the scores are built →
Expense ratio, dividend yield and assets under management are reported by the fund and refreshed daily. Every other figure on this page is computed by ETF Copilot.
All 9 Semiconductor ETFs ETF Copilot covers
- Xtrackers Semiconductor Select Equity ETF (CHPS)
- First Trust Nasdaq Semiconductor ETF (FTXL)
- Invesco Semiconductors ETF (PSI)
- Columbia Select Technology ETF (SEMI)
- Strive U.S. Semiconductor ETF (SHOC)
- VanEck Semiconductor ETF (SMH)
- Invesco PHLX Semiconductor ETF (SOXQ)
- iShares Semiconductor ETF (SOXX)
- State Street SPDR S&P Semiconductor ETF (XSD)
Which Semiconductor ETFs are compared head to head?
Every published head-to-head between these funds, the most searched first.
- SOXX vs SMH
- SMH vs SOXQ
- SOXX vs SOXQ
- SMH vs XSD
- SOXQ vs XSD
- SOXX vs XSD
- PSI vs SMH
- PSI vs SOXQ
- PSI vs SOXX
- PSI vs XSD
- FTXL vs PSI
- FTXL vs SMH
- FTXL vs SOXQ
- FTXL vs SOXX
- FTXL vs XSD
Where is money going in Semiconductors?
In the week to October 9, 2026, Semiconductors moved -4.7% and saw -$2.3B of net fund flow, which ETF Copilot reads as exiting — money leaving.
| Measure | Value |
|---|---|
| Price, 1 week | -4.7% |
| Net flow, 1 week | -$2.3B |
| Price, 1 month | +6.0% |
| Net flow, 1 month | -$368M |
Net fund flow is money into or out of the ETFs in this category, computed by ETF Copilot from daily fund assets. All 33 sectors side by side →
Cite this
ETF Copilot, “Semiconductor ETFs — scores, concentration and exposure”, as of October 9, 2026.
https://etf-copilot.com/category/semiconductors
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