Best Semiconductor ETFs
Which semiconductor ETFs does ETF Copilot list today? As of October 28, 2026, ETF Copilot's Best Semiconductor ETFs list holds five funds, largest first by assets: SMH, SOXX, SOXQ, XSD and PSI. Expense ratios across the five run from 0.19% to 0.55% a year, and their ETF Copilot overall scores run from 5.6 to 7.3.
Updated October 28, 2026
What stands out across Semiconductor ETFs
Expense ratios across the 5 semiconductor ETFs listed run from 0.19% to 0.55% a year, a median of 0.35%. SOXQ is the cheapest of the 5.
Across the 5 funds shown, ETF Copilot's overall scores run from 5.6 to 7.3 out of 10, with a median of 6.9.
Concentration varies widely among the 5 semiconductor ETFs listed: the ten largest holdings account for 29% of assets in the least concentrated fund and 69% in the most, a median of 61% across the list.
2 of 5 are more concentrated than the typical fund in their own category, on ETF Copilot's concentration measure.
The typical fund among the 5 semiconductor ETFs listed behaves like 19 equally weighted positions once holding weights are taken into account.
As of October 28, 2026, the largest fund on ETF Copilot's Best Semiconductor ETFs list by assets is VanEck Semiconductor ETF (SMH).
What are the Best Semiconductor ETFs? The 5 on this list
| # | Fund | ETF Copilot score | Expense ratio | Assets | Top 10 weight | Largest exposures |
|---|---|---|---|---|---|---|
| 1 | VanEck Semiconductor ETF (SMH) | 7.3/10 | 0.35% | $71.0B | 69% | Tech 100%, Semiconductors 92% |
| 2 | iShares Semiconductor ETF (SOXX) | 6.9/10 | 0.33% | $48.6B | 62% | Tech 100%, Semiconductors 96% |
| 3 | Invesco PHLX Semiconductor ETF (SOXQ) | 7.3/10 | 0.19% | $3.0B | 61% | Tech 100%, Semiconductors 97% |
| 4 | State Street SPDR S&P Semiconductor ETF (XSD) | 5.6/10 | 0.35% | $2.6B | 29% | Tech 97%, Semiconductors 84% |
| 5 | Invesco Semiconductors ETF (PSI) | 5.6/10 | 0.55% | $2.5B | 49% | Tech 100%, Semiconductors 98% |
ETF Copilot's 0–10 score rates a fund on value, growth, quality and risk against every US equity ETF we track. How the scores are built →
Expense ratio, dividend yield and assets under management are reported by the fund and refreshed daily. Every other figure on this page is computed by ETF Copilot.
Which Semiconductor ETFs are compared head to head?
Every published head-to-head between two Semiconductor ETFs, the most searched first.
- SOXX vs SMH
- SMH vs SOXQ
- SOXX vs SOXQ
- SMH vs XSD
- SOXQ vs XSD
- SOXX vs XSD
- PSI vs SMH
- PSI vs SOXQ
- PSI vs SOXX
- PSI vs XSD
- FTXL vs PSI
- FTXL vs SMH
- FTXL vs SOXQ
- FTXL vs SOXX
- FTXL vs XSD
Where is money going in Semiconductors?
In the week to October 28, 2026, Semiconductors moved +2.1% and saw +$9.4B of net fund flow, which ETF Copilot reads as aligned — price and money moving the same way.
| Measure | Value |
|---|---|
| Price, 1 week | +2.1% |
| Net flow, 1 week | +$9.4B |
| Price, 1 month | -7.2% |
| Net flow, 1 month | +$6.4B |
Net fund flow is money into or out of the ETFs in this category, computed by ETF Copilot from daily fund assets. All 33 sectors side by side →
Cite this
ETF Copilot, “Best Semiconductor ETFs”, as of October 28, 2026.
https://etf-copilot.com/best/semiconductor-etfs
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